Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics synthesizes the scientific and technological advances of laser annealing processes for current and emerging nanotechnologies. The book provides an overview of the laser-matter interactions of materials and recent advances in modeling of laser-related phenomena, with the bulk of the book focusing on current and emerging (beyond-CMOS) applications. Reviewed applications include laser annealing of CMOS, group IV semiconductors, superconducting materials, photonic materials, 2D materials. This comprehensive book is ideal for post-graduate students, new entrants, and experienced researchers in academia, research and development in materials science, physics and engineering.
- ISBN:
- 9780128202555
- 9780128202555
-
Category:
- Electronic devices & materials
- Format:
- Paperback
- Publication Date:
-
30-04-2021
- Language:
- English
- Publisher:
- Elsevier Science & Technology
- Country of origin:
- United Kingdom
- Dimensions (mm):
- 228.6x152.4mm
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