Atomic Layer Deposition

Atomic Layer Deposition

by Arthur ShermanDavid Cameron Marja-Leena Kääriäinen and others
Epub (Kobo), Epub (Adobe)
Publication Date: 22/04/2016

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Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD comprehensively from a practical perspective. It covers ALD's application to microelectronics (MEMS) and nanotechnology; many important new and emerging applications; thermal processes for ALD growth of nanometer thick films of semiconductors, oxides, metals and nitrides; and the formation of organic and hybrid materials.

ISBN:
9781118747384
9781118747384
Category:
Mechanical engineering & materials
Format:
Epub (Kobo), Epub (Adobe)
Publication Date:
22-04-2016
Language:
English
Publisher:
Wiley
David Cameron

David Cameron was elected Conservative leader in 2005 and in 2010 became Prime Minister after forming the UK's first coalition government for 70 years.

Following five years of economic transformation and radical reform, he won the first Conservative majority in a quarter of a century. In 2016 he stood down after his referendum on Britain's membership of the European Union resulted in a vote to leave

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