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Design Rules in a Semiconductor Foundry

Design Rules in a Semiconductor Foundry

by Eitan N. Shauly
Hardback
Publication Date: 30/11/2022
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Is designed to serve as a comprehensive and up-to-date manual for process, device, layout, and design engineers
Covers topics that designers as well as layout and process engineers deal with every day, such as front-end-of-line (FEOL) and back-end-of-line BEOL DRs, coverage DRs, stressors DRs, and modeling, foundry reliability, and advance (20 nm) step-by-step process flow
Can be used by those studying semiconductors and microelectronics as well as students and researchers in the fields of electrical engineering, physics, materials engineering, and chemical engineering
ISBN:
9789814968003
9789814968003
Category:
Electrical engineering
Format:
Hardback
Publication Date:
30-11-2022
Publisher:
Jenny Stanford Publishing
Country of origin:
Singapore
Pages:
808
Dimensions (mm):
229x152mm
Weight:
1.08kg

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You can find this item in:

Materials science Environmental science Physics Microwave technology Optical physics Applied optics Electronics engineering Life sciences: general issues Electrical engineering Biology
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