New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures.
Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can't keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise.
This book presents novel "smart" image processing methods, applications, and case studies concerning quality improvement of microscope images of microelectronic chips and process optimization. It explains an approach for high-resolution imaging of advanced metallization for micro- and nanoelectronics. This approach obviates the time-consuming preparation and selection of microscope measurement and sample conditions, enabling not only better electron-microscopic resolution, but also more efficient testing and quality control. This in turn leads to productivity gains in design and development of nano-scale ULSI chips.
The authors also present several approaches for super-resolving low-resolution images to improve failure analysis of microelectronic chips.
- Imaging systems & technology
- Publication Date:
- William Andrew Publishing
- Country of origin:
- United States
- Dimensions (mm):
Our Australian supplier has this title on order. You can place a backorder for this title now and we will ship it to you when it becomes available.
While we are unable to provide a delivery estimate, most backorders will be delivered within 120 days. If we are informed by our supplier that the title is no longer available during this time, we will cancel and refund you for this item. Likewise, if no delivery estimate has been provided within 120 days, we will contact our supplier for an update. If there is still no delivery estimate we will then cancel the item and provided you with a refund.
If we are able to secure you a copy of the title, our supplier will despatch it to our Sydney warehouse. Once received we make sure it is in perfect condition and then despatch it to you via the Australia Post eParcel service, which includes online tracking. You will receive a shipping notice from us when this occurs.