This reference book concentrates on microstructuring surfaces of optical materials with directed fluxes of off-electrode plasma generated by high-voltage gas discharge and developing methods and equipment related to this technique. It covers theoretical and experimental studies on the electrical and physical properties of high-voltage gas discharges used to generate plasma outside an electrode gap. A new class of methods and devices that makes it possible to implement a series of processes for fabricating diffraction microstructures on large format wafers is also discussed.
- ISBN:
- 9780367886264
- 9780367886264
-
Category:
- Plasma physics
- Format:
- Paperback
- Publication Date:
-
10-12-2019
- Publisher:
- Taylor & Francis Ltd
- Country of origin:
- United Kingdom
- Pages:
- 211
- Dimensions (mm):
- 234x156mm
- Weight:
- 0.45kg
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