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Physics of Radiofrequency Capacitive Discharge

Physics of Radiofrequency Capacitive Discharge

by V. P. Savinov
Hardback
Publication Date: 08/07/2018

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This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The main properties and characteristics of RFCD, the features of electric breakdown in a high-frequency field are also investigated. The properties of near-electrode layers of a spatial discharge, the nature of the electric field in them, and the processes of charge transport to electrodes are explored. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, graduate students and students of physics, physical chemistry, and relevant specialties.

ISBN:
9781138600805
9781138600805
Category:
Chemical physics
Format:
Hardback
Publication Date:
08-07-2018
Language:
English
Publisher:
CRC Press LLC
Country of origin:
United States
Dimensions (mm):
242x159x24mm
Weight:
0.18kg

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