Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.
- ISBN:
- 9783540204817
- 9783540204817
-
Category:
- Semi-conductors & super-conductors
- Format:
- Hardback
- Publication Date:
-
05-05-2004
- Language:
- English
- Publisher:
- Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
- Country of origin:
- Germany
- Pages:
- 490
- Dimensions (mm):
- 235x155x38mm
- Weight:
- 1.03kg
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