A complete guide to MEMS engineering, fabrication, and applications

This comprehensive engineering guide shows, step by step, how to incorporate cutting-edge microelectromechanical (MEMS) technology to enable internet-of-things (IoT) and artificial intelligence (AI) functionality in your designs. Written by an experienced educator and microelectronics expert, Fundamentals of Microelectromechanical Systems (MEMS) clearly explains the latest technologies and methods. Real-world examples, illustrations, and in-depth questions and problems reinforce key topics throughout. Readers will also take a look at the future of MEMS in the workforce and explore MEMS research and development.

Coverage includes:

• Basic microfabrication


• Micromachining


• Transduction principles


• RF and optical MEMS


• Mechanics and inertial sensors


• Thin film properties and SAW/BAW sensors


• Pressure sensors and microphones


• Piezoelectric films


• Material properties expressed as tensor


• Microfluidic systems and BioMEMS


• Power MEMS


• Electronic noises, interface circuits, and oscillators