This book provides a comprehensive overview of recent progress in Raman-based micro/nanoscale thermal characterization. The continuous miniaturization of electronic devices has created an urgent demand for efficient thermal design and management. At the nanoscale, accurate determination of thermophysical properties of materials becomes critical, driving the need for advanced characterization methods. Among these, Raman spectroscopy has emerged as a powerful and distinctive approach to micro- and nanoscale thermal characterization—commonly referred to as Raman thermometry. This technique enables noncontact, localized temperature measurements with high spatial resolution, greatly advancing the study of next-generation materials and structures such as two-dimensional materials, their heterostructures, and wide-bandgap semiconductors.

It introduces the fundamental measurement principles, describes experimental setups, and presents illustrative case studies. In addition, the limitations and challenges of the technique are critically discussed, with the aim of deepening understanding and guiding future applications of Raman thermometry in thermal science and technology.