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Green Etching Techniques for MEMS Applications

Green Etching Techniques for MEMS Applications

Sustainable, Fluorine-Free Etching Methods for Micro-Electro-Mechanical Systems

by Kaiying Wang
Hardback
Publication Date: 18/12/2025

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ISBN:
9781041144960
9781041144960
Category:
Nanotechnology
Format:
Hardback
Publication Date:
18-12-2025
Publisher:
Taylor & Francis Ltd
Country of origin:
United Kingdom
Pages:
122
Dimensions (mm):
234x156mm
Weight:
0.41kg

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