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Photopolymers

Photopolymers

Photoresist Materials, Processes, and Applications

by Kenichiro Nakamura
Hardback
Publication Date: 12/08/2014

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Advancements in photopolymers have led to groundbreaking achievements in the electronics, print, optical engineering, and medical fields. At present, photopolymers have myriad applications in semiconductor device manufacturing, printed circuit boards (PCBs), ultraviolet (UV) curing, printing plates, 3-D printing, microelectromechanical systems (MEMS), and medical materials. Processes such as photopolymerization, photodegradation, and photocrosslinking, as well as lithography technology in which photofabrications are performed by images of photopolymers, have given rise to very large-scale integrated (VLSI) circuits, microproducts, and more.

Addressing topics such as chemically amplified resists, immersion lithography, extreme ultraviolet (EUV) lithography, and nanoimprinting, Photopolymers: Photoresist Materials, Processes, and Applications covers photopolymers from core concepts to industrial applications, providing the chemical formulae and structures of the materials discussed as well as practical case studies from some of the world's largest corporations. Offering a state-of-the-art review of progress in the development of photopolymers, this book provides valuable insight into current and future opportunities for photopolymer use.
ISBN:
9781466517288
9781466517288
Category:
Applied optics
Format:
Hardback
Publication Date:
12-08-2014
Language:
English
Publisher:
Taylor & Francis Inc
Country of origin:
United States
Pages:
189
Dimensions (mm):
234x156x18mm
Weight:
0.45kg

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